Title: A novel method for extracting the metallurgical channel length of MOSFET's using a single device
Authors: Li, HH
Chu, YL
Wu, CY
Department of Electronics Engineering and Institute of Electronics
Issue Date: 1-Mar-1996
Abstract: A new charge-pumping method with de source/drain biases and specified gate waveforms is proposed to extract the metallurgical channel length of MOSFET's by using a single device. Using two charge-pumping currents of a single nMOSFET measured under different V-GL (V-GH for pMOSFET's), the metallurgical channel length can be easily extracted with an accuracy of 0.02 mu m. It is shown that the proposed novel method is self-consistent with the results obtained by the charge-pumping current measured from multidevices under different gate pulse waveforms and bias conditions.
URI: http://dx.doi.org/10.1109/55.485175
ISSN: 0741-3106
DOI: 10.1109/55.485175
Volume: 17
Issue: 3
Begin Page: 85
End Page: 87
Appears in Collections:Articles

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  1. A1996TX68200002.pdf