標題: Some Dielectric and Conduction Properties of the r.f. Reactively Sputtered Al2O3 Thin Film
作者: 陳茂傑
M.C.Chen
公開日期: 一月-1972
出版社: 交大學刊編輯委員會
摘要: Dielectric films of Al2O3 were prepared by r.f. reactive sputtering. Investigation was then made on their dielectric dispersion and leakage characteristics.
URI: http://hdl.handle.net/11536/137478
期刊: 交大學刊
SCIENCE BULLETIN NATIONAL CHIAO-TUNG UNIVERSITY
Volume: 5
Issue: 2
起始頁: 69
結束頁: 74
顯示於類別:交大學刊


文件中的檔案:

  1. HT001301-07.pdf