Title: High-performance poly-silicon TFTs incorporating LaAlO3 as the gate dielectric
Authors: Hung, BF
Chiang, KC
Huang, CC
Chin, A
McAlister, SP
Department of Electronics Engineering and Institute of Electronics
Keywords: high-kappa;LaAlO3;thin-film transistors (TFTs);threshold voltage
Issue Date: 1-Jun-2005
Abstract: We have integrated a high-κ, LaAlO3 dielectric into low-temperature poly-Si (LTPS) thin-film transistors (TFTs). Good TFT performance was achieved-such as a high drive current, low threshold voltage and subthreshold slope, as well as an excellent on/off current ratio and high gate-dielectric breakdown field. This was achieved without hydrogen passivation or special crystallization steps. The good performance is related to the high gate capacitance density and small equivalent-oxide thickness provided by the high-κ dielectric.
URI: http://dx.doi.org/10.1109/LED.2005.848622
ISSN: 0741-3106
DOI: 10.1109/LED.2005.848622
Volume: 26
Issue: 6
Begin Page: 384
End Page: 386
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