Title: A 3.3V 15.6b 6.1pJ/0.02% RH with 10ms Response Humidity Sensor for Respiratory Monitoring
Authors: Lai, Kelvin Yi-Tse
Yang, Yu-Tao
Chen, Bang-Jing
Shen, Chun-Jen
Shiu, Ming-Feng
He, Zih-Cheng
Chang, Hsie-Chia
Lee, Chen-Yi
Department of Electronics Engineering and Institute of Electronics
Keywords: Humidity Sensor;Capacitive Sensing;Low Power;Low Energy;Respiratory Monitoring;Health-Care
Issue Date: 2014
Abstract: An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 % RH at 1KS/s, 6.1pJ per 0.02% RH of sensitivity, and 10ms fast response time in TSMC 0.35-mu m CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40% RH to 0.2% RH and 50% RH to 0.1% RH, making it very suitable for wearable respiratory monitoring.
URI: http://hdl.handle.net/11536/135871
ISBN: 978-1-4799-4089-9
Begin Page: 293
End Page: 296
Appears in Collections:Conferences Paper