標題: Downgrade decision for control/dummy wafers in a fab
作者: Wu, MC
Chien, CS
Lu, KS
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: control wafers;downgrade decision;dummy wafers;monitor wafers;semiconductor fab;test wafers
公開日期: 1-九月-2005
摘要: Control and dummy (C/D) wafers are indispensable materials used in a semiconductor fab. C/D wafers stored in a high-grade buffer can be downgraded to several low-grade buffers. The downgrade decision is to determine the amount to downgrade for each of these low-grade buffers. Previous literature solves the downgrade decision by considering only the instantaneous WIP information, which is a short-term approach and may not yield the optimum solution in the long run. This paper presents an LP model to solve the downgrade decision problem, which aims to minimize the long-term daily usage of brand-new C/D wafers in a fab. The formulated problem assumes that the storage cost of C/D wafers is much less than the usage cost. This assumption has been justified by analyzing the cost structure of C/D wafers in a typical fab site.
URI: http://dx.doi.org/10.1007/s00170-003-2031-1
http://hdl.handle.net/11536/13378
ISSN: 0268-3768
DOI: 10.1007/s00170-003-2031-1
期刊: INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume: 26
Issue: 5-6
起始頁: 585
結束頁: 590
顯示於類別:期刊論文


文件中的檔案:

  1. 000231605200019.pdf