標題: A novel large displacement electrostatic actuator: pre-stress comb-drive actuator
作者: Chiou, JC
Lin, YJ
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 1-九月-2005
摘要: This investigation proposes a novel large vertical displacement electrostatic actuator, called the pre-stress comb-drive actuator (PCA), which exhibits no pull-in and no hysteresis characteristics. The proposed PCA consists of a set of comb fingers fabricated along the composite beam and substrate. One end of the composite beam is clamped to the anchor, whereas the other end is elevated vertically by the residual stress. The actuation occurs when the electrostatic force, induced by the fringe effect, pulls the composite beam downward to the substrate. A post-heat treatment process was employed to increase the initial lift height of the PCA to obtain a large actuation stroke. A mathematical model, based on a newly developed modeling approach, is introduced to estimate the static characteristic of the PCA. A PCA was fabricated using the PolyMUMPs process based on the proposed design concept. Following packaging and applying a post-heat treatment process, a 110 mu m initial tip height and a 90 mu m vertical motion range were achieved. Neither pull-in nor hysteresis was observed. The simulation results were closely matched with the observations. This work also studies the frequency response and measurement of the maximum vibration of the PCA.
URI: http://dx.doi.org/10.1088/0960-1317/15/9/005
http://hdl.handle.net/11536/13348
ISSN: 0960-1317
DOI: 10.1088/0960-1317/15/9/005
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 15
Issue: 9
起始頁: 1641
結束頁: 1648
顯示於類別:期刊論文


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