標題: Self-aligned platinum-silicide nanowires for biomolecule sensing
作者: Ko, FH
Yeh, ZH
Chen, CC
Liu, TF
材料科學與工程學系奈米科技碩博班
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
公開日期: 1-Nov-2005
摘要: A self-aligned platinum-silicide nanowire for biomolecule sensing is developed in this work, The 40 nm nanowire is fabricated through a sequence of electron-beam writing on the polysilicon film, line shrinkage with alkaline solution, platinum film deposition, 550 degrees C annealing, and aqua regia dissolution. The immobilization of single-stranded capture DNA onto the platinum-silicide nanowire is verified from the fluorescence-labeled technique, The field-effect transistor can distinguish the complementary, mismatched, and denatured DNA via the conductance difference. Although the nanowire sensor has not been integrated into a fluid channel system, we can sense the minimal target DNA concentration down to 100 fM, and the signal is still 1000-fold larger than the noise signal. (c) 2005 American Vacuum Society.
URI: http://dx.doi.org/10.1116/1.2090967
http://hdl.handle.net/11536/13114
ISSN: 1071-1023
DOI: 10.1116/1.2090967
期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume: 23
Issue: 6
起始頁: 3000
結束頁: 3005
Appears in Collections:Conferences Paper


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