標題: A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling
作者: Chou, BCS
Chen, YM
OuYang, M
Shie, JS
交大名義發表
光電工程學系
National Chiao Tung University
Department of Photonics
關鍵字: Pirani microsensors;electrothermal SPICE;constant-temperature circuits;temperature compensation
公開日期: 1-May-1996
摘要: A sensitive micro-Pirani vacuum sensor has been fabricated. With effective schemes of ambient-temperature compensation and stabilization, it is capable of measuring vacuum pressure linearly from 1 torr down to 10(-7) torr, a three orders-of-magnitude improvement in resolution over conventional gauges. A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed. It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables. Good agreement between the measured data obtained from a constant-temperature readout circuit and the simulation result is demonstrated.
URI: http://hdl.handle.net/11536/1302
ISSN: 0924-4247
期刊: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 53
Issue: 1-3
起始頁: 273
結束頁: 277
Appears in Collections:Conferences Paper


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  1. A1996UV64900010.pdf