Title: Characteristics of the epitaxy of InGaN-based light-emitting diodes grown by nanoscale epitaxial lateral overgrowth using a nitrided titanium buffer layer
Authors: Shieh, Chen-Yu
Li, Zhen-Yu
Chang, Jenq-Yang
Chi, Gou-Chung
Department of Photonics
Keywords: Epitaxial growth;Chemical vapor deposition;Electron microscopy;Optical properties
Issue Date: 1-May-2015
Abstract: In this work, a buffer layer of nitrided titanium (Ti) achieved through the nitridation of a Ti metal layer on a sapphire substrate was used for the epitaxial growth of InGaN-based light-emitting diodes (LEDs) achieved by low pressure metal-organic chemical vapor deposition. The effect of in-situ Ti metal nitridation on the performance of these InGaN-based LEDs was then investigated. It was very clear that the use of the nitrided Ti buffer layer (NTBL) induced the formation of a nanoscale epitaxial lateral overgrowth layer during the epitaxial growth. When evaluated by Raman spectroscopy, this epi-layer exhibited large in-plane compressive stress releasing with a Raman shift value of 567.9 cm(-1). Cathodoluminescence spectroscopy and transmission electron microscopy results indicated that the InGaN-based LEDs with an NTBL have improved crystal quality, with a low threading dislocations density being yielded via the strain relaxation in the InGaN-based LEDs. Based on the results mentioned above, the electroluminescence results indicate that the light performance of InGaN-based LEDs with an NTBL can be enhanced by 45% and 42% at 20 mA and 100 mA, respectively. These results suggest that the strain relaxation and quality improvement in the GaN epilayer could be responsible for the enhancement of emission power. (C) 2015 Published by Elsevier B.V.
URI: http://dx.doi.org/10.1016/j.matchemphys.2015.03.014
ISSN: 0254-0584
DOI: 10.1016/j.matchemphys.2015.03.014
Volume: 157
Begin Page: 63
End Page: 68
Appears in Collections:Articles