標題: Analytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometry
作者: Chao, YF
Lee, KY
Lin, YD
光電工程學系
Department of Photonics
公開日期: 10-Jun-2006
摘要: The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45 degrees and at -45 degrees, we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer. (c) 2006 Optical Society of America.
URI: http://dx.doi.org/10.1364/AO.45.003935
http://hdl.handle.net/11536/12158
ISSN: 0003-6935
DOI: 10.1364/AO.45.003935
期刊: APPLIED OPTICS
Volume: 45
Issue: 17
起始頁: 3935
結束頁: 3939
Appears in Collections:Articles


Files in This Item:

  1. 000238199700002.pdf