標題: Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60 nm resolution tomography
作者: Yin, GC
Tang, MT
Song, YF
Chen, FR
Liang, KS
Duewer, FW
Yun, WB
Ko, CH
Shieh, HPD
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
公開日期: 12-Jun-2006
摘要: An energy-tunable transmission hard x-ray microscope with close to 60 nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50 nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60 nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.
URI: http://dx.doi.org/10.1063/1.2211300
http://hdl.handle.net/11536/12151
ISSN: 0003-6951
DOI: 10.1063/1.2211300
期刊: APPLIED PHYSICS LETTERS
Volume: 88
Issue: 24
結束頁: 
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