標題: Aberrations measurement of fiber-end microlens by free-space microoptical Ronchi interferometer
作者: Tien, C. H.
Hung, C. H.
Lee, C. H.
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
關鍵字: integrated optics;microelectromechanical systems (MEMS);optical components;optical device fabrication
公開日期: 1-Jul-2006
摘要: We developed a microoptical Ronchi interferometer system in which a V-groove, an out-of-plane grating, a beam splitter, and a 45 degrees upward reflector integrated on a single silicon chip were used to measure the wavefront aberration caused by a microlens on the fiber front end. By the use of the microelectromechanical systems configuration, the fringe patterns caused by the different spherical aberration and defocus balances of the 0.34-numerical-aperture microlens can be captured and analyzed accordingly. As demonstrated by the experimental results, the proposed setup is capable of carrying out a simple wavefront variation measurement in the microscopic scale.
URI: http://dx.doi.org/10.1109/LPT.2006.880800
http://hdl.handle.net/11536/12087
ISSN: 1041-1135
DOI: 10.1109/LPT.2006.880800
期刊: IEEE PHOTONICS TECHNOLOGY LETTERS
Volume: 18
Issue: 13-16
起始頁: 1768
結束頁: 1770
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