|標題:||Aberrations measurement of fiber-end microlens by free-space microoptical Ronchi interferometer|
|作者:||Tien, C. H.|
Hung, C. H.
Lee, C. H.
Department of Photonics
Institute of Display
|關鍵字:||integrated optics;microelectromechanical systems (MEMS);optical components;optical device fabrication|
|摘要:||We developed a microoptical Ronchi interferometer system in which a V-groove, an out-of-plane grating, a beam splitter, and a 45 degrees upward reflector integrated on a single silicon chip were used to measure the wavefront aberration caused by a microlens on the fiber front end. By the use of the microelectromechanical systems configuration, the fringe patterns caused by the different spherical aberration and defocus balances of the 0.34-numerical-aperture microlens can be captured and analyzed accordingly. As demonstrated by the experimental results, the proposed setup is capable of carrying out a simple wavefront variation measurement in the microscopic scale.|
|期刊:||IEEE PHOTONICS TECHNOLOGY LETTERS|
|Appears in Collections:||Articles|
Files in This Item: