標題: Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding
作者: Shih, Teng-Kai
Chen, Chia-Fu
Ho, Jeng-Rong
Chuang, Fang-Tzu
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: PDMS;microlens;diffuser;replica molding
公開日期: 1-Nov-2006
摘要: This paper reports the fabrication method of PDMS (polydimethylsiloxane) microlens array based on the replica molding process, casting a liquid PDMS into concave microlens molds. Concave microlens molds were fabricated through spin-coating processes suspended a liquid PMMA film on the micro-drilled hole, leading to the formation of the special curvature. Then, PDMS microlens arrays and diffusers were fabricated by replica molding and discussed in this study. The fabricated microlenses have both good surface roughness and high-quality optical properties. Therefore, diffusers were fabricated by two-step replica molding. A high-intensity He-Ne laser beam was uniformly spread through diffusers. Experimental tests demonstrated that all PDMS elements are successfully fabricated by replica molding process and operated during optical measurement. (c) 2006 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.mee.2006.05.006
http://hdl.handle.net/11536/11561
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.05.006
期刊: MICROELECTRONIC ENGINEERING
Volume: 83
Issue: 11-12
起始頁: 2499
結束頁: 2503
Appears in Collections:Articles


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