標題: 30 nm resolution x-ray imaging at 8 keV using third order diffraction of a zone plate lens objective in a transmission microscope
作者: Yin, Gung-Chian
Song, Yen-Fang
Tang, Mau-Tsu
Chen, Fu-Rong
Liang, Keng S.
Duewer, Frederick W.
Feser, Michael
Yun, Wenbing
Shieh, Han-Ping D.
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
公開日期: 27-Nov-2006
摘要: A hard x-ray transmission microscope with 30 nm spatial resolution has been developed employing the third diffraction order of a zone plate objective. The microscope utilizes a capillary type condenser with suitable surface figure to generate a hollow cone illumination which is matched in illumination range to the numerical aperture of the third order diffraction of a zone plate with an outmost zone width of 50 nm. Using a test sample of a 150 nm thick gold spoke pattern with finest half-pitch of 30 nm, the authors obtained x-ray images with 30 nm resolution at 8 keV x-ray energy. (c) 2006 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2397483
http://hdl.handle.net/11536/11519
ISSN: 0003-6951
DOI: 10.1063/1.2397483
期刊: APPLIED PHYSICS LETTERS
Volume: 89
Issue: 22
結束頁: 
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