Title: ESD robustness of thin-film devices with different layout structures in LTPS technology
Authors: Deng, Chih-Kang
Ker, Ming-Dou
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Issue Date: 1-Dec-2006
Abstract: The electrostatic discharge (ESD) robustness of different thin-film devices, including three diodes and two thin-film transistors (TFTs) in low-temperature polysilicon (LTPS) technology, is investigated. By using the transmission line pulse generator (TLPG), the high-current characteristics and the secondary breakdown current (It2) of these thin-film devices are observed. The experimental results with different parameters and layout structures of these LTPS thin-film devices have been evaluated for optimizing ESD protection design for liquid crystal display (LCD) panel. (c) 2006 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.microrel.2006.01.008
http://hdl.handle.net/11536/11504
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2006.01.008
Journal: MICROELECTRONICS RELIABILITY
Volume: 46
Issue: 12
Begin Page: 2067
End Page: 2073
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