標題: Valence state map of iron oxide thin film obtained from electron spectroscopy imaging series
作者: Chen, Ko-Feng
Lo, Shen-Chuan
Chang, Li
Egerton, Ray
Kai, Ji-Jung
Lin, Juhn-Jong
Chen, Fu-Rong
材料科學與工程學系
電子物理學系
Department of Materials Science and Engineering
Department of Electrophysics
關鍵字: valence state map;electron spectroscopic imaging(ESI);iron oxide system;electron energy-loss spectroscopy(EELS)
公開日期: 2007
摘要: This paper demonstrates the applicability of electron-spectroscopic imaging (ESI) for valence-state mapping of the iron oxide system. We have previously developed a set of signal-processing methods for an EST series, to allow mapping Of sp(2)/sp(3) ratio, dielectric function and energy bandgap. In this study, these methods are applied to generate a valence-state map of an iron oxide thin film (Fe/alpha-Fe2O3). Two problems, data undersampling and a convolution effect associated with extraction of the image-spectrum from the core loss image series, were overcome by using cubic-polynomial interpolation and maximum-entropy deconvolution. As a result, the reconstructed image-spectrum obtained from the EST series images has a quality as good as that of conventional electron energy-loss spectra. The L-3/L-2 ratio of the reconstructed EST spectrum is determined to be 3.30 +/- 0.30 and 5.0 +/- 0.30 for Fe and alpha-Fe2O3, respectively. Our L-3/L-2, ratio mapping shows an accurate correspondence across the Cu/Fe/alpha-Fe2O3 region. The effect of delocalization and chromatic aberration on the EST resolution is discussed and estimated to be about 2 nm for the case of L-3/L-2, ratio mapping. (c) 2006 Published by Elsevier Ltd.
URI: http://hdl.handle.net/11536/11285
http://dx.doi.org/10.1016/j.micron.2006.06.004
ISSN: 0968-4328
DOI: 10.1016/j.micron.2006.06.004
期刊: MICRON
Volume: 38
Issue: 4
起始頁: 354
結束頁: 361
顯示於類別:期刊論文


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  1. 000244392400004.pdf