標題: Polarization degradation and breakdown of pulse-laser-deposited (Pb,Sr)TiO3 films at low temperatures
作者: Wang, Jyh-Liang
Shye, Der-Chi
Lai, Yi-Sheng
Tseng, Huai-Yuan
Juan, Chuan-Ping
Tsai, Chun-Chien
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: ferroelectric;pulsed-laser deposition;lead strontium fitanate;deposition temperature (substrate temperature);breakdown;fatigue
公開日期: 1-一月-2007
摘要: (Pb,Sr)TiO3 (PST) films were deposited on Pt/SiO2/Si by pulsed laser deposition at low substrate temperatures (T-s) ranging from 300 to 450 degrees C. The loss in remnant polarization (P-r) and coercive field (E-c) is found to be less than 17% after 10(10) switching cycles when T-s is higher than 350 degrees C. It is also suggested that the leakage current is reduced when T-s increases up to a temperature of 400 degrees C. However, PST films deposited at 450 degrees C may produce serious Pb-O volatilization, resulting in the deterioration of the crystallinity and high leakage currents. As a result, the 400 degrees C-deposited PST film reveals the lowest leakage current, nearly fatigued-free J-E characteristics after 10(10) switching cycles, and the best breakdown property, attributed to the enhanced crystallinity and low concentration of defects.
URI: http://dx.doi.org/10.1143/JJAP.46.267
http://hdl.handle.net/11536/11276
ISSN: 0021-4922
DOI: 10.1143/JJAP.46.267
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Volume: 46
Issue: 1
起始頁: 267
結束頁: 271
顯示於類別:期刊論文


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