標題: Study of an axial flow cyclone to remove nanoparticles in vacuum
作者: Tsai, Chuen-Jinn
Chen, Sheng-Chieh
Przekop, Rafal
Moskal, Arkadiusz
環境工程研究所
Institute of Environmental Engineering
公開日期: 1-Mar-2007
摘要: An axial flow cyclone for removing nanoparticles was tested for collection efficiency. Data were validated numerically in vacuum conditions of several Torrs, with flow rates of 0.35-0.57 slpm. The experimental cutoff aerodynamic diameter of the cyclone ranged from 21.7 to 49.8 nm. A 3-D numerical simulation was conducted first to calculate detailed flow and pressure fields, then a Brownian Dynamics simulation was done to determine the collection efficiency of nanoparticles. Both centrifugal force and Brownian diffusion were taken into account. The simulated results for both pressure drop and cutoff aerodynamic diameter are in good agreement with the experimental data. In comparison, previous theories using simplified tangential flow field assumption are not able to predict collection efficiencies accurately. The numerical model developed in this study can facilitate cyclone design to classify valuable nanopowders below a certain diameter, or to remove toxic nanoparticles from the vacuum exhaust of process chambers commonly used in high-tech industries.
URI: http://dx.doi.org/10.1021/es060518o
http://hdl.handle.net/11536/11059
ISSN: 0013-936X
DOI: 10.1021/es060518o
期刊: ENVIRONMENTAL SCIENCE & TECHNOLOGY
Volume: 41
Issue: 5
起始頁: 1689
結束頁: 1695
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