標題: Nano-roughening n-side surface of AlGaInP-based LEDs for increasing extraction efficiency
作者: Lee, Y. J.
Lu, T. C.
Kuo, H. C.
Wang, S. C.
Hsu, T. C.
Hsieh, M. H.
Jou, M. J.
Lee, B. J.
光電工程學系
Department of Photonics
關鍵字: chemical wet etching;AlGaInP-based LEDs;nano-roughening
公開日期: 25-三月-2007
摘要: A chemical wet etching technique is presented to form a nano-roughened surface with triangle-like morphology on n-side-up AlGaInP-based LEDs fabricated by adopting adhesive layer bonding scheme. A simple and commonly used H3PO4-based solution was applied for chemical wet etching. The morphology of nano-roughened surfaces is analyzed by the atomic force microscope (AFM) and significantly related to the enhancement factor of the LED output power. The output power shows 80% increase after optimizing the nano-roughened morphology of n-side surface, as compared to the ordinary flat surface LED. (c) 2006 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.mseb.2006.11.015
http://hdl.handle.net/11536/11013
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2006.11.015
期刊: MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Volume: 138
Issue: 2
起始頁: 157
結束頁: 160
顯示於類別:期刊論文


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