標題: Thickness effects on the electrical characteristics of Ba0.7Sr0.3TiO3 capacitors with nano-Cr interlayer
作者: Ho, Chia-Cheng
Chiou, Bi-Shiou
Chang, Li-Chun
電子工程學系及電子研究所
Innovative Packaging Research Center
Department of Electronics Engineering and Institute of Electronics
Innovative Packaging Research Center
公開日期: 26-Mar-2007
摘要: A multilayer Ba0.7Sr0.3TiO3/Cr/Ba0.7Sr0.3TiO3 (BST/Cr/BST) structure was sputtered sequentially onto Pt/Ti/SiO2/Si substrate. With the insertion of a 2 nm Cr interlayer, the temperature coefficient of capacitance of the BST/Cr/BST dielectric is about 69% lower than that of BST monolayer dielectric. The dielectric constant and dissipation factor as the function of Cr thickness are studied. X-ray diffraction patterns, the analysis results of energy dispersive spectroscopy, and the survey scan profiles of Auger electron spectroscopy reveal the formation of a TiO2 secondary phase after the multilayer is annealed at 800 degrees C in O-2 atmosphere. The insertion of nano-Cr interlayer improves the electrical properties of BST capacitors. (c) 2007 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2717553
http://hdl.handle.net/11536/11005
ISSN: 0003-6951
DOI: 10.1063/1.2717553
期刊: APPLIED PHYSICS LETTERS
Volume: 90
Issue: 13
結束頁: 
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