標題: Fabrication of ordered Ta(2)O(5) nanodots using an anodic aluminum oxide template on Si substrate
作者: Yang, Ching-Jung
Chen, Chili
Wu, Pu-Wei
Shieh, Jia-Min
Wang, Shun-Min
Liang, Shih-Wei
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 1-Apr-2007
摘要: Ordered arrays of Ta(2)O(5) nanodots were prepared using anodic aluminum oxide (AAO) as a template to support localized oxidation of TaN. Films of TaN (50 nm) and Al (1.5 mu m) were deposited successively on p-type Si wafers and followed by a two-step anodization process at 40 V using oxalic acid as the electrolyte. The first anodization promoted growth of irregular AAO from overlying Al film. After chemical etching, the second anodization was performed to develop well-organized AAO channels and initiate oxidation of underlying TaN film to form tantalum oxide nanodots at the AAO pore bottoms. X-ray photoelectron spectroscopy results confirmed the chemical nature of nanodots as stoichmetric Ta(2)O(5), X-ray diffraction demonstrated the amorphous characteristic of Ta(2)O(5). As shown in field-emission scanning electron microscopy and transmission electron results, the Ta(2)O(5) nanodots exhibited a hillock structure 80 nm in diameter at the bottom and 50 nm in height. We also synthesized 30-nm nanodots by adjusting AAO formation electrochemistry. This demonstrates the general applicability of the AAO template method for nanodot synthesis from nitride to oxide at a desirable size.
URI: http://dx.doi.org/10.1557/jmr.2007.0143
http://hdl.handle.net/11536/10976
ISSN: 0884-2914
DOI: 10.1557/jmr.2007.0143
期刊: JOURNAL OF MATERIALS RESEARCH
Volume: 22
Issue: 4
起始頁: 1064
結束頁: 1071
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