標題: The application of control chart for defects and defect clustering in IC manufacturing based on fuzzy theory
作者: Hsieh, Kun-Lin
Tong, Lee-Ing
Wang, Min-Chia
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: integrated circuits (IC);control chart;defect clustering;fuzzy theory
公開日期: 1-Apr-2007
摘要: c-Chart was frequently used to monitor wafer defects during IC manufacturing. The clustering degree of defect on a wafer will increase along with the area of wafer gradually enlarging. The defect clustering causes the Poisson-based c-chart to exhibit many false alarms. Although several revised control charts have been developed to reduce the number of false alarms, those control charts still have some disadvantages in practical use. This study proposes a control chart that applies fuzzy theory and engineering experience to monitor wafer defects with the consideration of defect clustering. The proposed control chart is simpler and more rational than those revised c-charts. Finally, a case study of an IC company, owing to the HsinChu Scientific part at Taiwan, is used to demonstrate and verify the rationality and effectiveness. (C) 2006 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.eswa.2006.01.050
http://hdl.handle.net/11536/10970
ISSN: 0957-4174
DOI: 10.1016/j.eswa.2006.01.050
期刊: EXPERT SYSTEMS WITH APPLICATIONS
Volume: 32
Issue: 3
起始頁: 765
結束頁: 776
Appears in Collections:Articles


Files in This Item:

  1. 000243799100004.pdf