Title: Self-organized tantalum oxide nanopyramidal arrays for antireflective structure
Authors: Wu, Chia-Tien
Ko, Fu-Hsiang
Lin, Chun-Hung
Department of Materials Science and Engineering
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
Issue Date: 23-Apr-2007
Abstract: A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (< 2%) than the nanodot arrays and thin film structures. (c) 2007 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2731659
ISSN: 0003-6951
DOI: 10.1063/1.2731659
Volume: 90
Issue: 17
End Page: 
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