標題: Self-organized tantalum oxide nanopyramidal arrays for antireflective structure
作者: Wu, Chia-Tien
Ko, Fu-Hsiang
Lin, Chun-Hung
材料科學與工程學系
材料科學與工程學系奈米科技碩博班
Department of Materials Science and Engineering
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
公開日期: 23-四月-2007
摘要: A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (< 2%) than the nanodot arrays and thin film structures. (c) 2007 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2731659
http://hdl.handle.net/11536/10884
ISSN: 0003-6951
DOI: 10.1063/1.2731659
期刊: APPLIED PHYSICS LETTERS
Volume: 90
Issue: 17
結束頁: 
顯示於類別:期刊論文


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