標題: Dispersion of gas pollutant in a fan-filter-unit (FFU) cleanroom
作者: Chen, Sheng-Chieh
Tsai, Chuen-Jinn
Li, Shou-Nan
Shih, Hui-Ya
環境工程研究所
Institute of Environmental Engineering
關鍵字: standard K-epsilon model;pollutant dispersion;working cleanroom
公開日期: 1-May-2007
摘要: . Numerical simulation and. experimental measurement of flow and concentration fields in a working fan-filter-unit (FFU) cleanroom have been conaucted in this study. The purpose,of the study is to find out the unsteady concentration distribution of a leaking gas pollutant. The standard K-e model was used for the simulation of the flow field. To obtain the gas concentration field, SF6 gas with a certain concentration was released as a simulated leaking source from a valve manifold box (VMB) for 5 or 10 min, respectively. Three Fourier transform infrared spectrometers (FTIRs) were simultaneously used to measure the spatial and temporal distributions of SF6 concentrations. The measured data were then compared with the numerical results and the agreement is seen to be quite good. From the numerical results, the pollutant hot spots, peak pollutant concentration at the end of leaking, and time taken for the concentration to reduce to near background level are obtained. (c) 2006 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.buildenv.2006.02.023
http://hdl.handle.net/11536/10839
ISSN: 0360-1323
DOI: 10.1016/j.buildenv.2006.02.023
期刊: BUILDING AND ENVIRONMENT
Volume: 42
Issue: 5
起始頁: 1902
結束頁: 1912
Appears in Collections:Articles


Files in This Item:

  1. 000243984000005.pdf