標題: Improvement of efficiency and ESD characteristics of ultraviolet light-emitting diodes by inserting AlGaN and SiN buffer layers
作者: Huang, G. S.
Kuo, H. C.
Lo, M. H.
Lu, T. C.
Tsai, J. Y.
Wang, S. C.
光電工程學系
Department of Photonics
關鍵字: defects;metalorganic chemical vapor deposition;nitrides;light emitting diodes
公開日期: 1-Jul-2007
摘要: We have studied the effect of the AlGaN insertion and SiN buffer layers of ultraviolet light-emitting diodes (UVLEDs) on efficiency and electrostatic discharge (ESD) characteristics of UVLEDs grown by metalorganic chemical vapor deposition. The etching pit density was reduced from 3.6 x 10(8) cm(-2) in conventional samples to 1.6 x 10(7) cm(-2) in UVLEDs grown with the AlGaN insertion layer and SiN buffer layer. During the ESD tests at the negative biases of 3000 V, the live percentage of UVLEDs increased from 67% in conventional samples to 86% in samples with AlGaN insertion layers and SiN buffer layers. In addition, the device shows a low leakage current of 1.1 x 10(-8) A at -5 V and the light output power was 70% higher than the conventional UVLEDs at an injection current of 20 mA. (c) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.jcrysgro.2007.04.022
http://hdl.handle.net/11536/10627
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2007.04.022
期刊: JOURNAL OF CRYSTAL GROWTH
Volume: 305
Issue: 1
起始頁: 55
結束頁: 58
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