標題: Control system for an electrostatically-driven microelectromechanical device
作者: Chiou, Jin-Chern
Lin, Yu-Chen
公開日期: 9-Oct-2003
摘要: The present invention relates to a control system for an electrostatically-driven microelectromechanical device, which uses multiple electrodes to control the microelectromechanical device, i.e. the lower driven electrode of a capacitor with known two parallel driven electrodes Is cut Into a number of small electrodes. By selecting an electrode pattern for a desired electrostatic force, it is capable of altering the non-linearity of the device based on various applications and achieving a characteristic such as a linear driven, digital driven, or ultimately optimal driven manners, which is able to reach high operation accuracy for the existing circuit that only possesses a limited accuracy.
官方說明文件#: H02H001/00
URI: http://hdl.handle.net/11536/105787
專利國: USA
專利號碼: 20030189807
Appears in Collections:Patents


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  1. 20030189807.pdf