標題: Apparatus and method for forming multilayer polymer thin film
作者: Meng, Hsin-Fei
Horng, Sheng-Fu
Tseng, Hsin-Rong
Tuan, Chi-Shen
公開日期: 28-Jan-2010
摘要: Apparatus and method for forming multilayer polymer thin film. The method uses a solution container with a gap to prevent the huge amount of solution from directly falling on the first layer. Then the wet film is formed by moving the container with the thin film thickness is decided by the distance between the gap and the substrate. The wet film is dried in a very short time by the heater therefore there is no time for the second solvent to dissolve the first layer. The method can effectively achieve the large-area and multilayer structure in organic devices through solution processing.
官方說明文件#: B05D005/12
URI: http://hdl.handle.net/11536/105446
專利國: USA
專利號碼: 20100021622
Appears in Collections:Patents


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  1. 20100021622.pdf