標題: DISPLACEMENT MEASUREMENT SYSTEM AND METHOD THEREOF
作者: Hsu, Kuei-Chu
Chen, Chii-Chang
Chan, Chia-Hua
Lai, Yin-Chieh
公開日期: 11-Nov-2010
摘要: A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters the two-dimensional grating, a zero-order light beam and a plurality of first-order diffraction beams are generated. The zero-order light beam interferes with two of the first-order beams in different directions, so that corresponding interference fringes are formed on the photo sensor. Accordingly, when the two-dimensional grating moves, displacements of the two-dimensional grating in the different directions are obtained by calculating phase differences of the interference fringes in the corresponding directions. Besides, when the two-dimensional grating rotates, the rotational angle of the two-dimensional grating is obtained from the corresponding rotational angle of a diffraction pattern of the first-order diffraction beams.
官方說明文件#: G01B011/14
URI: http://hdl.handle.net/11536/105362
專利國: USA
專利號碼: 20100284022
Appears in Collections:Patents


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  1. 20100284022.pdf