標題: Nozzle plate containing multiple micro-orifices for cascade impactor and method for manufacturing the same
作者: Tsai Chuen-Jinn
Chen Sheng-Chieh
Chen Hong-Dar
公開日期: 1-Sep-2011
摘要: A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.
官方說明文件#: G01N001/22
B05D003/10
URI: http://hdl.handle.net/11536/105266
專利國: USA
專利號碼: 20110209528
Appears in Collections:Patents


Files in This Item:

  1. 20110209528.pdf