標題: Run-by-run process control of metal sputter deposition: Combining time series and extended kalman filter
作者: Chen, Juhn-Horng
Kuo, Tzu-Wei
Lee, An-Chen
機械工程學系
Department of Mechanical Engineering
關鍵字: d-EWMA controller;deposition rate;extended Kalman filter;time series model;time-varying d-EWMA controller
公開日期: 1-Aug-2007
URI: http://dx.doi.org/10.1109/TSM.2007.901392
http://hdl.handle.net/11536/10497
ISSN: 0894-6507
DOI: 10.1109/TSM.2007.901392
期刊: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume: 20
Issue: 3
起始頁: 278
結束頁: 285
Appears in Collections:Articles


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