標題: METHOD FOR MANUFACTURING A NOZZLE PLATE CONTAINING MULTIPLE MICRO-ORIFICES FOR CASCADE IMPACTOR
作者: TSAI Chuen-Jinn
CHEN Sheng-Chieh
CHEN Hong-Dar
公開日期: 30-Jan-2014
摘要: A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.
官方說明文件#: B44C001/22
URI: http://hdl.handle.net/11536/104961
專利國: USA
專利號碼: 20140027406
Appears in Collections:Patents


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  1. 20140027406.pdf