標題: High-resolution through-focus metric with two-pitch grating target
作者: Shyu, Deh-Ming
Lu, Mao-Hong
Ko, Chun-Hung
光電工程學系
Department of Photonics
公開日期: 1-Aug-2007
摘要: Through-focus focus-metric is a method that is used to analyze images on a fixed plane with the help of focus-metric values when the target moves through the focus. In this study, an optical microscope having a magnification of 250x is constructed. A two-pitch grating target is imaged on a CCD detector and through-focus image data are measured. In addition, the optical field on the CCD detector is simulated using the boundary element method and physical optics propagation. By comparing the measured focus-metric signatures with the simulated signatures, information regarding the linewidth is obtained. The results show that the through-focus focus-metric method is a very sensitive method that can be used for measuring parameters such as the linewidth. Thus, a nanoscale resolution can be achieved. (C) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.optcom.2007.04.001
http://hdl.handle.net/11536/10491
ISSN: 0030-4018
DOI: 10.1016/j.optcom.2007.04.001
期刊: OPTICS COMMUNICATIONS
Volume: 276
Issue: 1
起始頁: 31
結束頁: 36
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