Title: Ultra fast self-corrected polarization modulated ellipsometer
Authors: Tsai, Hsiu-Ming
Chen, Leng-Chun
Chao, Yu-Faye
Department of Photonics
Keywords: Ellipsometry;Polarimetry;Photoelastic modulator
Issue Date: 28-Feb-2011
Abstract: A high speed self-corrected algorithm is proposed for the polarization modulated ellipsometry (PME). In this post-flight analysis, we prove that a set of optimized ellipsometric parameters (EPs) can be obtained by using the intensities at 4 specific temporal phases. The correction ability to its initial phase by this technique has been demonstrated through a twisted nematic liquid crystals (TN-LC) cell under the driving of a square wave. Furthermore, the optimal modulation amplitude in obtaining the accurate and precise set of EPs will be discussed in this work. (C) 2011 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2010.12.087
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2010.12.087
Volume: 519
Issue: 9
Begin Page: 2746
End Page: 2749
Appears in Collections:Conferences Paper

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