標題: Ultra fast self-corrected polarization modulated ellipsometer
作者: Tsai, Hsiu-Ming
Chen, Leng-Chun
Chao, Yu-Faye
光電工程學系
Department of Photonics
關鍵字: Ellipsometry;Polarimetry;Photoelastic modulator
公開日期: 28-二月-2011
摘要: A high speed self-corrected algorithm is proposed for the polarization modulated ellipsometry (PME). In this post-flight analysis, we prove that a set of optimized ellipsometric parameters (EPs) can be obtained by using the intensities at 4 specific temporal phases. The correction ability to its initial phase by this technique has been demonstrated through a twisted nematic liquid crystals (TN-LC) cell under the driving of a square wave. Furthermore, the optimal modulation amplitude in obtaining the accurate and precise set of EPs will be discussed in this work. (C) 2011 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2010.12.087
http://hdl.handle.net/11536/1018
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2010.12.087
期刊: THIN SOLID FILMS
Volume: 519
Issue: 9
起始頁: 2746
結束頁: 2749
顯示於類別:會議論文


文件中的檔案:

  1. 000289174200039.pdf