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Results 1-9 of 9 (Search time: 0.003 seconds).

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Issue DateTitleAuthor(s)
1-Mar-2006Effects of plasma treatment in the tungsten process for chemical vapor deposition titanium nitride barrier film beyond nanometer technologyChen, KW; Wang, YL; Chang, L; Li, FY; Hwang, GJ; 材料科學與工程學系; Department of Materials Science and Engineering
1-Dec-1995Thermal stability of AlSiCu/W/n(+)p diodes with and without TiN barrier layerYeh, WK; Chen, MC; Wang, PJ; Liu, LM; Lin, MS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1995以三氧化鎢薄膜電色製作二氧化碳感測器廖學彬; Liao, Xue-Bin; 趙書琦; Shuchi Chao; 電子物理系所
1995X光光罩多矽氮化矽鼓膜及吸收劑之研究蔣敏雄; Chiang, Min-Hsiung; 蘇翔; Su Shyang; 電子研究所
1999使用氮化處理技術改進低壓化學氣相沉積鎢及低介電常數材料作為極大型積體電路金屬接觸擴散障礙層之特性研究鄧一中; I-Chung Deng; 張國明; Kow-Ming Chang; 電子研究所
1996氟雜質對化學氣相沉積鎢膜閘極MOS電容的影響施傑文; Shih, Chieh Wen; 張國明 , 羅正忠; Kow-Ming Chang, Jen-Chung Lou; 電子研究所
1997低介電常數材料與金屬(鎢、鈦與氮化鈦)化學氣相沈積在積體電路上的應用與研究梅玉貞; Mei, Yu-Jane; 張俊彥; Chun-Yen Chang; 電子研究所
1-Dec-1995Selective tungsten CVD on submicron contact holeYeh, WK; Chen, MC; Wang, PJ; Liu, LM; Lin, MS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Feb-2017Stability study of indium tungsten oxide thin-film transistors annealed under various ambient conditionsQu, Mingyue; Chang, Chih-Hsiang; Meng, Ting; Zhang, Qun; Liu, Po-Tsun; Shieh, Han-Ping D.; 光電工程學系; Department of Photonics