Browsing by Author CHENG, KL

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Showing results 1 to 8 of 8
Issue DateTitleAuthor(s)
1-Jun-1995CHARACTERIZATION OF H-2/N-2 PLASMA PASSIVATION PROCESS FOR POLY-SI THIN-FILM TRANSISTORS (TFTS)TSAI, MJ; WANG, FS; CHENG, KL; WANG, SY; FENG, MS; CHENG, HC; 材料科學與工程學系; 電子工程學系及電子研究所; Department of Materials Science and Engineering; Department of Electronics Engineering and Institute of Electronics
9-Jan-1995EFFECT OF SIH4/CH4 FLOW RATIO ON THE GROWTH OF BETA-SIC ON SI BY ELECTRON-CYCLOTRON-RESONANCE CHEMICAL-VAPOR-DEPOSITION AT 500-DEGREES-CLIU, CC; LEE, CY; CHENG, KL; CHENG, HC; YEW, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
15-Mar-1992INFLUENCE OF IMPLANT CONDITION ON THE TRANSIENT-ENHANCED DIFFUSION OF ION-IMPLANTED BORON IN SILICONJUANG, MH; WAN, FS; LIU, HW; CHENG, KL; CHENG, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1995MICROCRYSTALLINE beta-SIC GROWTH ON SI BY ECR-CVD AT 500 degrees CCHENG, KL; LIU, CC; CHENG, HC; LEE, CY; YEW, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Oct-1995MICROCRYSTALLINE SIC FILMS GROWN BY ELECTRON-CYCLOTRON-RESONANCE CHEMICAL-VAPOR-DEPOSITION AT LOW-TEMPERATURESCHENG, KL; CHENG, HC; LIU, CC; LEE, C; YEW, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Oct-1995MICROCRYSTALLINE SIC FILMS GROWN BY ELECTRON-CYCLOTRON-RESONANCE CHEMICAL-VAPOR-DEPOSITION AT LOW-TEMPERATURESCHENG, KL; CHENG, HC; LIU, CC; LEE, C; YEW, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Apr-1992SUPPRESSION OF ANOMALOUS DIFFUSION OF ION-IMPLANTED BORON IN SILICON BY LASER PROCESSINGJUANG, MH; WAN, FS; LIU, HW; CHENG, KL; CHENG, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Feb-1995VERY-LOW TEMPERATURE DEPOSITION OF POLYCRYSTALLINE SI FILMS FABRICATED BY HYDROGEN DILUTION WITH ELECTRON-CYCLOTRON-RESONANCE CHEMICAL-VAPOR-DEPOSITIONWANG, KC; CHENG, KL; JIANG, YL; YEW, TR; HWANG, HL; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics